Nes of this pattern are imaged: Major right in (b), Figure 5. SEM images of a pattern formed by 15 gold pads (a). Distinct zones of this pattern are imaged: Top rated suitable in (b), middle left in (d) and bottom right in (e); (c,f) high resolution pictures of person pads. All scale bars correspond to 400 middle left in (d) and bottom proper in (e); (c,f) high resolution images of person pads. All scale bars correspond to 400 nm. nm.Table 1. Measured areas Atopo (PZT) and corresponding uncertainties uAtopo (PZT) for the 15 gold Table 1. Measured locations Atopo (PZT) and corresponding uncertainties uAtopo(PZT) for the 15 gold pads around the PZT sample, the correction aspect N used to appropriate location values measured PMNpads around the PZT sample, the correction issue N applied to right location values measured on the around the PMN-PT sample. PT sample.PadPad Quantity Quantity 1 two three four 5 six 71 2 3 4 five 6 7 8 9 ten 11 12 13 14Atopo (PZT) Atopo (PZT) ( 2 ( 2) ) 0.020.02 0.050.05 0.one hundred.ten 0.160.16 0.24 0.24 0.35 0.35 0.45 0.560.45 0.56 0.70 1.02 1.40 1.83 two.34 2.92 three.uuAtopo (PZT) Atopo (PZT) 7.8 7.NN four.47 four.9.five 9.five three.1 three.1 3.three three.three 2.6 two.six 1.5 1.five 1.3 1.three 1.1.three 1.7 1.3 1.1 1.2 1.0 1.four 0.two.48 two.48 two.22 2.22 1.99 1.70 1.70 1.56 1.56 1.47 1.47 1.1.99 1.47 1.47 1.34 1.29 1.32 1.28 1.24 1.Table 1 provides the combined DMPO site uncertainty for each pad region of PZT sample. This uncertainty is calculated in the root sum square (RSS) of two elements: (i) the repeatability computed on a set of three SEM images, and (ii) the SEM calibration uncertainty.3.0.1.Nanomaterials 2021, 11,Table 1 gives the combined uncertainty for each pad area of PZT sample. This uncertainty is calculated from the root sum square (RSS) of two elements: (i) the 9 of 19 repeatability computed on a set of three SEM pictures, and (ii) the SEM calibration uncertainty. three.two. Capacitance Measurements 3.2. Capacitance Measurements As described in the Section 2, the capacitance maps maps on the samples are deterAs described inside the Procedures section, the capacitanceof the high-high- samples are determined the measured values of S11,m -Irofulven References corrected making use of the SMM calibration protocol, mined from from the measured values of S11,m corrected using the SMM calibration protocol, microwave frequency frequency (right here f = The GHz). The mSOL method is at a given at a offered microwave (right here f = 3.67 GHz). 3.67 mSOL method is applied usapplied working with the A61 and A64 samples samples as described in particulars in [32]. Figure 6a ing the A61 and A64 reference referenceas described in information in [32]. Figure 6a shows shows the capacitance map measured reference sample A64 A64 the numbering with the the capacitance map measured on theon the reference samplewith using the numbering of your various capacitive micro-structures. A set of capacitances (triplet) is chosen from different capacitive micro-structures. A set of 3 three capacitances (triplet) is selected from values to extract the three correction variables (e00 , e (e , e ) e11 for the SMM calibration. these these values to extract the three correction things 01 ,00e1101,for)the SMM calibration. We We a triplet of capacitances in a way a way each of the selection of variety values linked usedused a triplet of capacitances in to cover to cover all thepossibleof possible values related together with the A64 sample (from fF). The ten fF). The SMM is hence calibrated range with the A64 sample (from 0.three fF to ten 0.3 fF to SMM is hence calibrated inside this inside this array of capacitances. of capacitances.Figure.